Nanocal calibration and pitch recertification of a Hitachi microscale standard

Dmitry Yeremin; Arkady Nikitin; Al Sicignano; Matt Sandy; Tim Goldburt; Bryan Tracy

doi:10.1117/12.536095

24 May 2004 Nanocal calibration and pitch recertification of a Hitachi microscale standard

Dmitry Yeremin, Arkady Nikitin, Al Sicignano, Matt Sandy, Tim Goldburt, Bryan Tracy

Proceedings Volume 5375, Metrology, Inspection, and Process Control for Microlithography XVIII; (2004) https://doi.org/10.1117/12.536095
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

The pitch of a Hitachi Standard Micro Scale was measured using NanoCal and a LEO 1560 SEM. The pitch pedigree and certification were intentionally withheld from Nanometrology team members to enable independent measurement and certification of an unknown Hitachi Micro Scale standard during this work. NanoCal allows one to achieve pitch measurements with sub-nanometer accuracy and precision as well as to perform SEM magnification calibration with the precision and accuracy required for sub 90 nm SEM metrology.

Citation Download Citation

Dmitry Yeremin, Arkady Nikitin, Al Sicignano, Matt Sandy, Tim Goldburt, and Bryan Tracy "Nanocal calibration and pitch recertification of a Hitachi microscale standard", Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); https://doi.org/10.1117/12.536095

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