24 May 2004 Nanocal calibration and pitch recertification of a Hitachi microscale standard
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Abstract
The pitch of a Hitachi Standard Micro Scale was measured using NanoCal and a LEO 1560 SEM. The pitch pedigree and certification were intentionally withheld from Nanometrology team members to enable independent measurement and certification of an unknown Hitachi Micro Scale standard during this work. NanoCal allows one to achieve pitch measurements with sub-nanometer accuracy and precision as well as to perform SEM magnification calibration with the precision and accuracy required for sub 90 nm SEM metrology.
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Dmitry Yeremin, Dmitry Yeremin, Arkady Nikitin, Arkady Nikitin, Al Sicignano, Al Sicignano, Matt Sandy, Matt Sandy, Tim Goldburt, Tim Goldburt, Bryan Tracy, Bryan Tracy, } "Nanocal calibration and pitch recertification of a Hitachi microscale standard", Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); doi: 10.1117/12.536095; https://doi.org/10.1117/12.536095
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