14 May 2004 A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions
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Abstract
It is confirmed that strong inhibitors must not only interact with the polymer but also are highly hydrophobic. A proportional relationship was shown between the inhibition and log P of different additives. In general, PAGs also follow this relationship, however triphenylsulfonium PAGs appear to be less effective inhibitors than bis-t-butylphenyliodonium PAGs having the same anions.
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Medhat A. Toukhy, Medhat A. Toukhy, Joseph Oberlander, Joseph Oberlander, Dalil Rahman, Dalil Rahman, Francis M. Houlihan, Francis M. Houlihan, } "A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); doi: 10.1117/12.537077; https://doi.org/10.1117/12.537077
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