Analysis of solvent effect to control the BARC coating uniformity

Min-Ho Jung; Sangwoong Yoon; Eun-Soon Chung; Beom-Sang Yoo; Jeong Yun Ya; Don Winning; Boo Deuk Kim; Hong Lee; Do Young Kim; Young Hoon Kim; Myungsun Kim; Young Ho Kim; Sang-Mun Chon

doi:10.1117/12.533924

14 May 2004 Analysis of solvent effect to control the BARC coating uniformity

Min-Ho Jung, Sangwoong Yoon, Eun-Soon Chung, Beom-Sang Yoo, Jeong Yun Ya, Don Winning, Boo Deuk Kim, Hong Lee, Do Young Kim, Young Hoon Kim, Myungsun Kim, Young Ho Kim, Sang-Mun Chon

Author Affiliations +

Proceedings Volume 5376, Advances in Resist Technology and Processing XXI; (2004) https://doi.org/10.1117/12.533924
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

There are many considerations to the design of BARC materials. Among those many properties, one important property that can effect lithographic performance is BARC coating uniformity. In general, the basic coating property (conformal or planar) depends on basic characteristics of polymer (Mw, chemistry, etc). But another major factor to control the coating uniformity is the choice of solvent system in the formulation of the BARC. According to our experimental results, two major factors that can affect the coating uniformity of one BARC are the vapor pressure and the hydrophilicity of solvents. If any solvent has too high vapor pressure and high hydrophilicity relatively, polymer segregation occurs in BARC surface area in case of high humidity condition, resulted in bad coating uniformity. In this paper, we will show basic evaluation results including the morphology change of BARC surface with several solvents which can be used in BARC formulation according to various humidity and temperature conditions. And also we will show the solution to overcome this problem in device manufacturing.

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Min-Ho Jung, Sangwoong Yoon, Eun-Soon Chung, Beom-Sang Yoo, Jeong Yun Ya, Don Winning, Boo Deuk Kim, Hong Lee, Do Young Kim, Young Hoon Kim, Myungsun Kim, Young Ho Kim, and Sang-Mun Chon "Analysis of solvent effect to control the BARC coating uniformity", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); https://doi.org/10.1117/12.533924

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