Material origins of line-edge roughness: Monte Carlo simulations and scaling analysis

George P. Patsis; Vassilios Constantoudis; Evangelos Gogolides

doi:10.1117/12.535202

14 May 2004 Material origins of line-edge roughness: Monte Carlo simulations and scaling analysis

George P. Patsis, Vassilios Constantoudis, Evangelos Gogolides

Proceedings Volume 5376, Advances in Resist Technology and Processing XXI; (2004) https://doi.org/10.1117/12.535202
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

A fast 2D/3D resist dissolution algorithm is used to quantify line-edge roughness and determine its relation to resist material parameters, such as the polymerization length distribution, the end-to-end distance and the radius of gyration, along with the effects of acid-diffusion. The same relation between surface roughness and exposure dose known to hold experimentally is also shown to be valid for line-edge roughness. Increasing average polymerization length results in increased values of line-edge roughness, radius of gyration and end-to-end distance establishing an immediate relation between material properties and measured line-edge roughness (LER). The effects of the edge depth and length of measurement and of the free volume on LER vs. are also investigated.

Citation Download Citation

George P. Patsis, Vassilios Constantoudis, and Evangelos Gogolides "Material origins of line-edge roughness: Monte Carlo simulations and scaling analysis", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); https://doi.org/10.1117/12.535202

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