Surface conditioning solutions for pattern collapse reduction

Peng Zhang; Manuel Jaramillo Jr.; Danielle M. King; Madhukar B. Rao; Bridget L. O'Brien; Brenda F. Ross

doi:10.1117/12.535283

14 May 2004 Surface conditioning solutions for pattern collapse reduction

Peng Zhang, Manuel Jaramillo Jr., Danielle M. King, Madhukar B. Rao, Bridget L. O'Brien, Brenda F. Ross

Proceedings Volume 5376, Advances in Resist Technology and Processing XXI; (2004) https://doi.org/10.1117/12.535283
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Recently, there has been a growing interest in using surface conditioning solutions to solve the pattern collapse challenge. In this study, we investigated both pattern collapse and defect performance of surface conditioning solutions on multiple 193 nm resist systems. While the surface conditioning solutions were able to reduce the pattern collapse with good defect control with a majority of resist systems, it can increase the defect level on certain resist. Shortening the surface treatment step and optimizing the formulation can reduce the defect counts to the control level without compromising pattern collapse performance. This study also demonstrated that the surface conditioning solution is compatible with 248 nm processing, enabling the patterning of 90 nm 1:1.2 pitch lines.

Citation Download Citation

Peng Zhang, Manuel Jaramillo Jr., Danielle M. King, Madhukar B. Rao, Bridget L. O'Brien, and Brenda F. Ross "Surface conditioning solutions for pattern collapse reduction", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); https://doi.org/10.1117/12.535283

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available