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ChangAn Wang, Guohong Zhang, Stephen DeMoor, Colin Tan, John Ilzhoefer, Chris Atkinson, Chad Wickman, Steve Hansen, Bernd Geh, Donis G. Flagello, Mark Boehm, "Characterization of ACLV for advanced technology nodes using scatterometer-based lens fingerprinting technique," Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004);