28 May 2004 Investigation of stray light characteristic by multiple Gaussian modeling and its OPC application
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Abstract
Stray light is analyzed by scattering range. For the short range, stray light distributes as 1/r4 and comes from aberration. For the mid range and the long range, in the assumption of Gaussian distribution, characteristic scattering length of specific tools is estimated. EOR is proposed which contains information of layer geometry and scattering range characteristic of flare. To minimize CD errors from OPC, flare level and EOR should be considered in the OPC procedure.
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Ho-Chul Kim, Ho-Chul Kim, Dong-Seok Nam, Dong-Seok Nam, Gi-Sung Yeo, Gi-Sung Yeo, Suk-Joo Lee, Suk-Joo Lee, Sang-Gyun Woo, Sang-Gyun Woo, Han-Ku Cho, Han-Ku Cho, Woo-Sung Han, Woo-Sung Han, } "Investigation of stray light characteristic by multiple Gaussian modeling and its OPC application", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); doi: 10.1117/12.533373; https://doi.org/10.1117/12.533373
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