28 May 2004 Method to improve the resolution of contact holes
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Abstract
Various methods of printing small contact holes are discussed. Although the resolution capability is one key object for printing small contacts, it does not always reflect the process window. This paper compares resolution as well as process windows for several contact printing techniques. It shows the huge benefit of ring-type contacts with respect to process window even when compared to Bessel like contacts.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard Kunkel, Ralf Ziebold, "Method to improve the resolution of contact holes", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); doi: 10.1117/12.535246; https://doi.org/10.1117/12.535246
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