Methods for benchmarking photolithography simulators: part II

Mark D. Smith; Jeffrey D. Byers; Chris A. Mack

doi:10.1117/12.537584

28 May 2004 Methods for benchmarking photolithography simulators: part II

Mark D. Smith, Jeffrey D. Byers, Chris A. Mack

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.537584
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Numerical simulation has become an indispensable tool for the design and optimization of photolithographic processes. Because the semiconductor industry now relies heavily on these tools, it is necessary to be able to benchmark their accuracy - as feature sizes continue to shrink, the numerical error in these simulators must decrease as well. In a previous paper, we proposed benchmarks for aerial image calculation that were drawn from the optics literature. Because these benchmarks were closed-form solutions, we could use these results as an absolute standard for determining the numerical accuracy of an aerial image calculation. In the current study, we continue this effort by presenting closed-form solutions that can serve as benchmarks for the resist response to the projection optics. Benchmarks are proposed for film stack reflectivity and image in resist. Specific results will be presented for PROLITH.

Citation Download Citation

Mark D. Smith, Jeffrey D. Byers, and Chris A. Mack "Methods for benchmarking photolithography simulators: part II", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.537584

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available