28 May 2004 Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask
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Abstract
We describe a simple concept of an in situ photolithographic technique by using a liquid crystal display panel as a configurable mask and a CCD (charge coupled device) camera as a simple imaging system. The successive operation of imaging and configurable masking enabled a real-time projection lithography process by the selective exposure of light through LCD (liquid crystal display) panel. A correction of a defect pattern could be also demonstrated by optimizing the exposure conditions and aligning the mismatches between imaging and the corresponding lithographic patterning.
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Sung Hoon Pieh, Byoung-Ho Park, Yu-Jin Jang, Kang-Hyun Kim, Gyu-Tae Kim, "Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); doi: 10.1117/12.534501; https://doi.org/10.1117/12.534501
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