29 April 2004 Mix-and-match overlay method by compensating dynamic scan distortion error
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Abstract
This paper discusses the compensation method and APC system to reduce errors in mix and matching overlay between scanners. We proposed the compensation model for intra-field errors in mix and matching. And we developed the advanced APC system also to improve dynamic scan distortion using the compensation model.
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Takuya Kono, Takuya Kono, Manabu Takakuwa, Manabu Takakuwa, Keita Asanuma, Keita Asanuma, Nobuhiro Komine, Nobuhiro Komine, Tatsuhiko Higashiki, Tatsuhiko Higashiki, } "Mix-and-match overlay method by compensating dynamic scan distortion error", Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); doi: 10.1117/12.535097; https://doi.org/10.1117/12.535097
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