29 April 2004 Mix-and-match overlay method by compensating dynamic scan distortion error
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This paper discusses the compensation method and APC system to reduce errors in mix and matching overlay between scanners. We proposed the compensation model for intra-field errors in mix and matching. And we developed the advanced APC system also to improve dynamic scan distortion using the compensation model.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takuya Kono, Takuya Kono, Manabu Takakuwa, Manabu Takakuwa, Keita Asanuma, Keita Asanuma, Nobuhiro Komine, Nobuhiro Komine, Tatsuhiko Higashiki, Tatsuhiko Higashiki, "Mix-and-match overlay method by compensating dynamic scan distortion error", Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); doi: 10.1117/12.535097; https://doi.org/10.1117/12.535097

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