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29 April 2004 Mix-and-match overlay method by compensating dynamic scan distortion error
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Abstract
This paper discusses the compensation method and APC system to reduce errors in mix and matching overlay between scanners. We proposed the compensation model for intra-field errors in mix and matching. And we developed the advanced APC system also to improve dynamic scan distortion using the compensation model.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takuya Kono, Manabu Takakuwa, Keita Asanuma, Nobuhiro Komine, and Tatsuhiko Higashiki "Mix-and-match overlay method by compensating dynamic scan distortion error", Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); https://doi.org/10.1117/12.535097
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