Propagation of APC models across product boundaries

Tito Chowdhury; Mark Freeland; Ole Krogh; Geethakrishnan Narasimhan; Gayathri Raghavendra

doi:10.1117/12.536454

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29 April 2004 Propagation of APC models across product boundaries

Tito Chowdhury, Mark Freeland, Ole Krogh, Geethakrishnan Narasimhan, Gayathri Raghavendra

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Proceedings Volume 5378, Data Analysis and Modeling for Process Control; (2004) https://doi.org/10.1117/12.536454
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

The BCT solution is an automatic correction for systematic offset built into the PCS product based on calibration from 2-5 wafers. This paper explores the validity of a predictive model for process control for use by manufacturers of semiconductor devices with a multitude of products or part numbers. The proposed model defines the parameters of interests as a function of the film stack, tool attributes, and mask characteristics. The paper proposes a process for model development that dramatically reduces the cost of materials, tool time, and engineering effort.

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Tito Chowdhury, Mark Freeland, Ole Krogh, Geethakrishnan Narasimhan, and Gayathri Raghavendra "Propagation of APC models across product boundaries", Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); https://doi.org/10.1117/12.536454

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