Paper
3 May 2004 DFM: magic bullet or marketing hype?
Author Affiliations +
Abstract
Over the past year interest in DFM has exploded in the semiconductor industry, and this despite the lack of a uniform working definition. The origin of this surge is shown to be related to three converging trends: increased design cost, shortened product lifetimes, and lower manufacturing yields for 130 nm technologies versus previous generations. A comparison to other industries reveals the distinct challenges attendant to semiconductor DFM and highlights the unique risks, which often necessitate non-intuitive solutions. Finally, the case is made to view DFM as a woven throughout the physical design flow, from cell design to mask data prep.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph D. Sawicki "DFM: magic bullet or marketing hype?", Proc. SPIE 5379, Design and Process Integration for Microelectronic Manufacturing II, (3 May 2004); https://doi.org/10.1117/12.546792
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Design for manufacturing

Manufacturing

Computer aided design

Optical proximity correction

Photomasks

Semiconductors

Design for manufacturability

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