Atmospheric Pressure Induced Reduction Errors In Reduction Stepper Lenses

Fred Sporon-Fiedler; John Williams

doi:10.1117/12.947751

23 July 1985 Atmospheric Pressure Induced Reduction Errors In Reduction Stepper Lenses

Fred Sporon-Fiedler, John Williams

Proceedings Volume 0538, Optical Microlithography IV; (1985) https://doi.org/10.1117/12.947751
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

The effect of atmospheric pressure variations on the reduction ratio of a stepper lens is discussed. Data for a 5X lens is presented which demonstrates a dependence of the reduction ratio on the atmospheric pressure. The dependence can lead to a .3 um error in the reduction of an 11 mm field. A model based on thin lens optics is also presented which predicts the observed trends. Methods of minimizing the impact of this effect are discussed.

Citation Download Citation

Fred Sporon-Fiedler and John Williams "Atmospheric Pressure Induced Reduction Errors In Reduction Stepper Lenses", Proc. SPIE 0538, Optical Microlithography IV, (23 July 1985); https://doi.org/10.1117/12.947751

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