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9 September 2004 Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design
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Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.557055
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States
Abstract
We developed a compact mechanical mount package for Solid Immersion Lens (SIL). At 600 nm wavelength illumination, the resolution of this system is 200 nm with an effective NA of 1.5.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Chen, David Felix, Sang-Ki Park, Paul Hauser, Brendan P. McCarthy, Dror Sarid, Christian D. Poweleit, Jose Menendez, and Tom D. Milster "Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); https://doi.org/10.1117/12.557055
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