9 September 2004 Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design
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Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.557055
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States
Abstract
We developed a compact mechanical mount package for Solid Immersion Lens (SIL). At 600 nm wavelength illumination, the resolution of this system is 200 nm with an effective NA of 1.5.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Chen, Tao Chen, David Felix, David Felix, Sang-Ki Park, Sang-Ki Park, Paul Hauser, Paul Hauser, Brendan P. McCarthy, Brendan P. McCarthy, Dror Sarid, Dror Sarid, Christian D. Poweleit, Christian D. Poweleit, Jose Menendez, Jose Menendez, Tom D. Milster, Tom D. Milster, "Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); doi: 10.1117/12.557055; https://doi.org/10.1117/12.557055
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