9 September 2004 Polymer focusing grating coupler implemented by nanoimprinting method for the use of blue laser
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Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.568084
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States
Abstract
A polymer focusing waveguide grating coupler(FGC) was implemented by UV nanoimprinting method. The size of this focusing grating is 1 mm X 1 mm and the total device size is 8 mm X 2 mm. We use the UV sensible polymer which is coated by spin coating method. After nanoimprinting the device, the residual thickness on the slab waveguide is about 10 nm ~ 30 nm. The spot size of this polymer FGC is 347 nm for blue laser and the coupling efficiency is 28.2%.
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Hojun Ryu, Dongwoo Suh, Yongwoo Park, Muncheol Paek, "Polymer focusing grating coupler implemented by nanoimprinting method for the use of blue laser", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); doi: 10.1117/12.568084; https://doi.org/10.1117/12.568084
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