9 September 2004 Polymer focusing grating coupler implemented by nanoimprinting method for the use of blue laser
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Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.568084
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States
Abstract
A polymer focusing waveguide grating coupler(FGC) was implemented by UV nanoimprinting method. The size of this focusing grating is 1 mm X 1 mm and the total device size is 8 mm X 2 mm. We use the UV sensible polymer which is coated by spin coating method. After nanoimprinting the device, the residual thickness on the slab waveguide is about 10 nm ~ 30 nm. The spot size of this polymer FGC is 347 nm for blue laser and the coupling efficiency is 28.2%.
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Hojun Ryu, Hojun Ryu, Dongwoo Suh, Dongwoo Suh, Yongwoo Park, Yongwoo Park, Muncheol Paek, Muncheol Paek, } "Polymer focusing grating coupler implemented by nanoimprinting method for the use of blue laser", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); doi: 10.1117/12.568084; https://doi.org/10.1117/12.568084
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