26 July 2004 Electrostatic operation and curvature modeling for a MEMS flexible film actuator
Author Affiliations +
In this paper we develop a mathematical model to simulate the actuation of a multilayer metallic strip. In the first step of the model development, we employ previous theory to quantify the radius of curvature in the unimorph due to differing thermal coefficients in the constituent materials. The resulting radius of curvature is subsequently used to compute the voltage required to uncurl the actuator. Numerical experiments were performed with the model and the trends were found to be in agreement with experimental data.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Edmonds, B. Edmonds, J. Ernstberger, J. Ernstberger, K. Ghosh, K. Ghosh, J. Malaugh, J. Malaugh, D. Nfodjo, D. Nfodjo, W. Samyono, W. Samyono, X. Xu, X. Xu, David Edward Dausch, David Edward Dausch, Scott Goodwin, Scott Goodwin, Ralph C. Smith, Ralph C. Smith, } "Electrostatic operation and curvature modeling for a MEMS flexible film actuator", Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); doi: 10.1117/12.547389; https://doi.org/10.1117/12.547389

Back to Top