26 July 2004 Model development and control design for high-speed atomic force microscopy
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Abstract
This paper addresses the development of energy-based models and model-based control designs necessary to achieve present and projected applications involving atomic force microscopy. The models are based on a combination of energy analysis at the mesoscopic level with stochastic homogenization techniques to construct low-order macroscopic models. Approximate model inverses are then employed as filters to linearize transducer responses for linear robust control design.
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Andrew G. Hatch, Andrew G. Hatch, Ralph C. Smith, Ralph C. Smith, Tathagata De, Tathagata De, } "Model development and control design for high-speed atomic force microscopy", Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); doi: 10.1117/12.539921; https://doi.org/10.1117/12.539921
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