CAD/CAM for MEMS and BioMEMS

Brian Hargrave; Bryan Irwin; Robert Parkhill; Kenneth H Church; Michael N. Nguyen; Anatoly Kachurin; William L Warren

doi:10.1117/12.521503

29 July 2004 CAD/CAM for MEMS and BioMEMS

Brian Hargrave, Bryan Irwin, Robert Parkhill, Kenneth H Church, Michael N. Nguyen, Anatoly Kachurin, William L Warren

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.521503
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

Novel devices can be relatively simple in theory and modeling, but difficult and many times unfeasible to fabricate in a traditional cleanroom environment. We have developed a CAD/CAM tool capable of integrating multiple materials in the electronic, photonic, and biological regimes for applications in both MEMS and BioMEMS devices. Some materials are known and more fully characterized, such as thick film resistors or conductors, while other materials such as biodegradable scaffolding are new but showing promise to realize heterogenous tissue engineered constructs and drug delivery devices. The tool does not discriminate, but rather places these materials in specified locations with precision volumetric control, gently, conformally, and in 3-D. This paper will describe the enabling aspect of true 3-D maskless fabrication as well as describe multiple device structures and demonstrations.

Citation Download Citation

Brian Hargrave, Bryan Irwin, Robert Parkhill, Kenneth H Church, Michael N. Nguyen, Anatoly Kachurin, and William L Warren "CAD/CAM for MEMS and BioMEMS", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.521503

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
12 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microelectromechanical systems

Printing

BioMEMS

Packaging

Pulsed laser operation

Tissues

Waveguides

Show All Keywords

Keywords/Phrases

Search In:

Publication Years