29 July 2004 Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis
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Abstract
Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 μ g/√Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°c and shock survivability of more than 1000 g.
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Ananth Selvarajan, Jagannath Nayak, Talabuttala Srinivas, D. V. K. Sastry, "Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.546460; https://doi.org/10.1117/12.546460
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