29 July 2004 Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis
Author Affiliations +
Abstract
Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 μ g/√Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°c and shock survivability of more than 1000 g.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ananth Selvarajan, Ananth Selvarajan, Jagannath Nayak, Jagannath Nayak, Talabuttala Srinivas, Talabuttala Srinivas, D. V. K. Sastry, D. V. K. Sastry, } "Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.546460; https://doi.org/10.1117/12.546460
PROCEEDINGS
12 PAGES


SHARE
Back to Top