29 July 2004 Design and fabrication of low-loss RF MEMS switches for a broadband reflectarray
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This paper presents the design, fabrication and testing of capacitive RF MEMS switches for microwave/mm- wave applications on high-resistivity silicon substrate or glass. The feasibility study and demonstrator fabrication of a new concept of reflector network using MEMS switch based phase-shifters concept for space antennas is presented. These switches can be accurately modeled using 3-D static solvers. The loss in the up-state position is equivalent to the CPW line loss and is 0.1-0.3 dB at 10-40 GHz. It is seen that the capacitance, inductance and series resistance can be accurately extracted from DC-40 GHz S-parameter measurements. The reflector array antennas utilization for phase control avoids the use of very expensive directive antennas and covers a very large frequencies range. We will deal with the configuration, the composition and arrangement of MEMS switches, used to control the phase shift of the electromagnetic wave reflected by each elementary cell.
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Afshin Ziaei, Afshin Ziaei, Thierry Dean, Thierry Dean, Michel Charrier, Michel Charrier, Paolo Bondavalli, Paolo Bondavalli, Jean-Philippe Polizzi, Jean-Philippe Polizzi, Herve Legay, Herve Legay, Beatrice Pinte, Beatrice Pinte, Etienne Girard, Etienne Girard, Raphael Gillard, Raphael Gillard, } "Design and fabrication of low-loss RF MEMS switches for a broadband reflectarray", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.539893; https://doi.org/10.1117/12.539893

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