High-aspect-ratio neural probes for monolithic integration with ultra-low-power CMOS operational amplifier circuit

Tinghui Xin; Pratul K. Ajmera; Chuang Zhang; Ashok Srivastava

doi:10.1117/12.539593

29 July 2004 High-aspect-ratio neural probes for monolithic integration with ultra-low-power CMOS operational amplifier circuit

Tinghui Xin, Pratul K. Ajmera, Chuang Zhang, Ashok Srivastava

Author Affiliations +

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.539593
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

A microprobe array for recording neural signals has been designed and fabricated for future monolithic integration with an ultra-low power CMOS operational amplifier circuit on a 2 mm × 2 mm chip. A LIGA-like process is employed utilizing UV lithography and electrodeposition techniques. Probes are fabricated on silicon substrate. The fabrication process is compatible with monolithic integration with CMOS signal processing circuitry. The probes are 210 um high and have an aspect ratio 3:1. Comments are made on processing issues related to chip-level monolithic integration.

Citation Download Citation

Tinghui Xin, Pratul K. Ajmera, Chuang Zhang, and Ashok Srivastava "High-aspect-ratio neural probes for monolithic integration with ultra-low-power CMOS operational amplifier circuit", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.539593

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available