Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers

Emmanuel Saucedo-Flores; Ruben Ruelas; Alejandro Contreras-Nuno; Jose Mireles Jr.

doi:10.1117/12.545329

29 July 2004 Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers

Emmanuel Saucedo-Flores, Ruben Ruelas, Alejandro Contreras-Nuno, Jose Mireles Jr.

Author Affiliations +

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.545329
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

This paper presents a novel method for surface micro-machining of pin-jointed actuators using only two active polySi layers. An alternative sacrificial layer deposition and etching sequence is proposed in order to achieve the linkage construction. The implementation of a four-level profile in the first sacrificial layer is a key factor to significantly reduce topography issues when depositing subsequent layers. Adding to this are some design considerations to further smooth the surface topography irregularities so that a reasonable clearance between the first and second mechanically active layers is obtained. As a result, the need of a planarization process step is foreseen to be avoided. The main advantages of the proposed construction technology are process simplification and standardization conditions in key deposit steps.

Citation Download Citation

Emmanuel Saucedo-Flores, Ruben Ruelas, Alejandro Contreras-Nuno, and Jose Mireles Jr. "Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.545329

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KEYWORDS

Etching

Actuators

Microelectromechanical systems

Optical lithography

Micromachining

Oxides

Photoresist materials

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