29 July 2004 Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers
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Abstract
This paper presents a novel method for surface micro-machining of pin-jointed actuators using only two active polySi layers. An alternative sacrificial layer deposition and etching sequence is proposed in order to achieve the linkage construction. The implementation of a four-level profile in the first sacrificial layer is a key factor to significantly reduce topography issues when depositing subsequent layers. Adding to this are some design considerations to further smooth the surface topography irregularities so that a reasonable clearance between the first and second mechanically active layers is obtained. As a result, the need of a planarization process step is foreseen to be avoided. The main advantages of the proposed construction technology are process simplification and standardization conditions in key deposit steps.
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Emmanuel Saucedo-Flores, Ruben Ruelas, Alejandro Contreras-Nuno, Jose Mireles, "Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.545329; https://doi.org/10.1117/12.545329
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