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26 July 2004 Mechanics of MEMS: a review of modeling, analysis, and design
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Abstract
The paper provides a review of the literature dedicated to existing modeling, analysis, synthesis and optimization tools, together with the associated design procedures for MEMS applications, by looking at the approximate analytical algorithms and finite element procedures in the static, dynamical and coupled-field domains as applied to a large compartment of compliant members and their corresponding devices. The paper gives a classification of MEMS according to their structure and another classification as a function of their function. Main architectures of compliant microdevices are also reviewed, including torsion mirrors, bending mirrors, bimorph/multimorph transducers, accelerometers, gyroscopes, scratch drives, out-of-the-plane microcantilevers, sensing devices, resonators, switches or filters. Attention is dedicated to operational means of actuation, such as thermal, electrostatic, magnetic, electromagnetic, piezoelectric or shape-memory-generated, and to their integration into the overall microsystem design. Numerical modeling techniques, such as finite or boundary element model algorithms/codes that are utilized in the analysis and design of MEMS are also presented.
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Ephrahim Garcia, Nicolae Lobontiu, and Yoonsu Nam "Mechanics of MEMS: a review of modeling, analysis, and design", Proc. SPIE 5390, Smart Structures and Materials 2004: Smart Structures and Integrated Systems, (26 July 2004); https://doi.org/10.1117/12.540070
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