21 July 2004 Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance
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NDE activities at the Laboratory for Acoustic Diagnosis and Quality Assurance (EADQ) Dresden are outlined. The applied methods comprise acoustic, thermal, optical and X-ray ones. Additionally, scanning probe methods (SPM) and scanning electron microscopy (SEM) are used. Combinations of different methods are especially effective. This is demonstrated for the coupling of an acoustic approach with SEM. For NDE on a micro- and nano-meter scale, preparation of appropriate test flaws and the verification of the NDE results turn out to be a challenge. To meet this challenge, we propose an approach based on focused ion beam technique.
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Bernd Koehler, Bernd Koehler, Juergen Schreiber, Juergen Schreiber, Beatrice Bendjus, Beatrice Bendjus, Martin Herms, Martin Herms, Valeri Melov, Valeri Melov, Lukas Helfen, Lukas Helfen, Petr Mikulik, Petr Mikulik, Tilo Baumbach, Tilo Baumbach, } "Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance", Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); doi: 10.1117/12.541652; https://doi.org/10.1117/12.541652

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