Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation

S. S. Borisov; Eugene A. Grachev; S. I. Zaitsev

doi:10.1117/12.552147

1 March 2004 Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation

S. S. Borisov, Eugene A. Grachev, S. I. Zaitsev

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Proceedings Volume 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2004) https://doi.org/10.1117/12.552147
Event: Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2003, Moscow, Russian Federation

Abstract

Problems of backscattered and true-secondary spectra as far as transmission spectra simulation using discrete looses approximation are regarded in this article. Developed model allows acquiring the electron energy spectra from samples with complicated 3-d structure. Besides due to higher detailing of the discrete looses method one can evaluate the spatial energy and accumulated charge distributions more accurately. Simulation results are compared with the experimental ones, SEM image simulation examples are given.

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S. S. Borisov, Eugene A. Grachev, and S. I. Zaitsev "Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation", Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); https://doi.org/10.1117/12.552147

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