Electron-optical system of a small-scale electron beam ion source

V. G. Abdul'manov; P. D. Voblyi; P. V. Nevskii

doi:10.1117/12.552134

1 March 2004 Electron-optical system of a small-scale electron beam ion source

V. G. Abdul'manov, P. D. Voblyi, P. V. Nevskii

Proceedings Volume 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2004) https://doi.org/10.1117/12.552134
Event: Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2003, Moscow, Russian Federation

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V. G. Abdul'manov, P. D. Voblyi, and P. V. Nevskii "Electron-optical system of a small-scale electron beam ion source", Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); https://doi.org/10.1117/12.552134

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