1 March 2004 Ion-beam energy spectrum monitoring system
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Proceedings Volume 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2004) https://doi.org/10.1117/12.552027
Event: Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2003, Moscow, Russian Federation
Abstract
Absence of the ion beam monitoring facilities restricts using ion beams for treatment of materials. One of the important ion beam parameters to be measured is the ion energy. In the paper considered are the principles of ion energy distribution monitoring. The described construction allows to choose properly the working mode of ion sources for material treatment.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. N. Kozlov, V. D. Smolyaninov, A. P. Eremin, Anatoly M. Filachev, "Ion-beam energy spectrum monitoring system", Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); doi: 10.1117/12.552027; https://doi.org/10.1117/12.552027
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