1 March 2004 Spread function and limit resolution of deflecting electrostatic energy analyzers
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Proceedings Volume 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2004) https://doi.org/10.1117/12.552041
Event: Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2003, Moscow, Russian Federation
Abstract
The spread function of electrostatic analyzers plays a key role in reconstructing the electron spectrum. The paper takes the toroidal energy analyzer as an example to simulate the work of its electron optical system and calculate the spread function of the limit resolution of deflecting electrostatic energy analyzers. The relationship between the spread function of the electrostatic analyzer and the source size and position, the width of the entrance and exit slits, the aberration coefficients of its electron optical system, and positioning errors is determined. As the dispersion depends on the relative difference between particle energy and energy settings, the fundamental spectrometric equation for the electrostatic energy analyzer is shown to look like heterogeneous convolution. For this reason the resolution of the analyzer falls with the growing operating voltage and can only be analyzed by using the local modulation transfer function, which is Fourier-series expansion of the spread function at a specific operating voltage. The energy spectrum free from phase errors is shown to determine the limit resolution. The resolution as function of the exit slit width, control voltage and contrast is defined.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boris G. Freinkman, Boris G. Freinkman, Edward I. Rau, Edward I. Rau, S. I. Zaytsev, S. I. Zaytsev, } "Spread function and limit resolution of deflecting electrostatic energy analyzers", Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); doi: 10.1117/12.552041; https://doi.org/10.1117/12.552041
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