2 April 2004 Pulse laser processing of metal thin films on glass substrates
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Proceedings Volume 5399, Laser-Assisted Micro- and Nanotechnologies 2003; (2004) https://doi.org/10.1117/12.552819
Event: Laser-Assisted Micro- and Nanotechnologies 2003, 2003, St. Petersburg, Russian Federation
Abstract
The possibility of the pulse laser radiation treatment of thin metal films on glass substrates has been studied experimentally. On the glass substrates with sprayed coating the diffraction structures were obtained due to the selective evaporation of metal at the interference of the powerful pulse laser radiation. The experiments were conducted using copper, aluminum films and films from titanium oxides. The thickness of the films on the glass substrates was 0.1 ÷ 0.12 μm. The regimes normally used during the film treatment with a laser beam were as follows: the wavelength was 1.06 μm, the pulse duration was 10 ns, and the enegy density of the beam was 10 mJ/mm2. To obtain an interference pattern on the treated surface the beam of the coherent radiation was preliminary split into two. In dependence on the convergence angle of the interference beams, the diffraction gratings had the lattice spacing in the range of 1 ÷ 6 μm. They were used to produce diffraction lenses. These lenses are a plane device with a ring-shape zone of concentric grating grooves capable to focus a certain part of incident radiation. In dependence on the wavelength, the radiation is collected on the optic axis at different distances from the diffraction lens. This fact makes it possible to use the lens in production of a simple monochromator. The structure of the diffraction gratings obtained has been studied, and their main characteristics and main spheres of their application have been determined.
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Gennady M. Mikheev, Ruslan G. Zonov, Dmitry G. Kaluzhny, "Pulse laser processing of metal thin films on glass substrates", Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552819; https://doi.org/10.1117/12.552819
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