2 April 2004 Pulsed VUV sources and their application to surface cleaning of optical materials
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Proceedings Volume 5399, Laser-Assisted Micro- and Nanotechnologies 2003; (2004) https://doi.org/10.1117/12.552735
Event: Laser-Assisted Micro- and Nanotechnologies 2003, 2003, St. Petersburg, Russian Federation
Abstract
Development of pulsed excitation techniques for high-pressure dielectric barrier discharges (DBD) has led to a short-pulsed, high-peak-power, spatially uniform source of UV7VUV radiation -- a preferred type of output for materials processing and many other applications. Results of such a Xe2* DBD source at 172 nm for removing mountants from optical surfaces and for removing hydrocarbon contamination from optical and polymer surfaces are presented.
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Deb M. Kane, Deb M. Kane, D. Hirschausen, D. Hirschausen, B. K. Ward, B. K. Ward, Robert J. Carman, Robert J. Carman, Richard P. Mildren, Richard P. Mildren, } "Pulsed VUV sources and their application to surface cleaning of optical materials", Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552735; https://doi.org/10.1117/12.552735
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