Ion Beam Reduction Of Optical Scatter From Coated Metal Surfaces

G. A. Al-Jumaily; J. J. McNally; K. C. Jungling; J. R. McNeil

doi:10.1117/12.976154

20 November 1985 Ion Beam Reduction Of Optical Scatter From Coated Metal Surfaces

G. A. Al-Jumaily, J. J. McNally, K. C. Jungling, J. R. McNeil

Proceedings Volume 0540, Southwest Conf on Optics '85; (1985) https://doi.org/10.1117/12.976154
Event: 1985 Albuquerque Conferences on Optics, 1985, Albuquerque, United States

Abstract

Deposition of thin (0.2 - 2.0 μm) metal film on a polished metal substrate changes its scatter characteristic. The light scatter due to high spatial frequency structure is reduced by as much as a factor of ten; total integrated scatter is reduced by as much as a factor of four. The effect is strongly influenced by the deposition mechanism employed, film and substrate materials and film thickness. The effect is most apparent when using simultaneous Ar+ bombardment during film deposition (i.e., ion assisted deposition).

Citation Download Citation

G. A. Al-Jumaily, J. J. McNally, K. C. Jungling, and J. R. McNeil "Ion Beam Reduction Of Optical Scatter From Coated Metal Surfaces", Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); https://doi.org/10.1117/12.976154

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