5 April 2004 Molecular dynamics study of nonlinear sputtering
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Abstract
Sputtering of Ni and Cu fcc metals under impact of small N-atomic clusters (N=1÷55) with energies of 500 eV/atom is studied by means of classical molecular dynamics (MD) method. The mechanisms responsible on observed non-linear effects in sputtering (like non-additive enhancement of sputtering yield, late emission, etc.) are analyzed at atomic scale. The role of electronic subsystem of the metals is also discussed in respect to observed spike effects that take place both at collisional and post-collisional cascade stages. It is demonstrated that electron-phonon coupling may significantly influence on post-cascade heat spike development reducing non-additive enhancement of sputtering yields of metals in course of cluster bombardment.
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Evgeni E. Zhurkin, Evgeni E. Zhurkin, Anton S. Kolesnikov, Anton S. Kolesnikov, } "Molecular dynamics study of nonlinear sputtering", Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); doi: 10.1117/12.555386; https://doi.org/10.1117/12.555386
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