Automatical optimization of pupil filters for high-resolution photolithography

M. Machin; M. Gitlin; Nikolay G. Savinskii

doi:10.1117/12.556989

28 May 2004 Automatical optimization of pupil filters for high-resolution photolithography

M. Machin, M. Gitlin, Nikolay G. Savinskii

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.556989
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

A pupil filter optimization algorithm is presented. The algorithm was tested for low-aperture stepper. The experimental data for resolution and depth of focus enhancement are described.

Citation Download Citation

M. Machin, M. Gitlin, and Nikolay G. Savinskii "Automatical optimization of pupil filters for high-resolution photolithography", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.556989

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