Bi film growing for nanowire fabrication

Anatoliy V. Chernykh; Aleksandr I. Il'in; Oleg V. Kononenko; Gennady M. Mikhailov

doi:10.1117/12.558309

28 May 2004 Bi film growing for nanowire fabrication

Anatoliy V. Chernykh, Aleksandr I. Il'in, Oleg V. Kononenko, Gennady M. Mikhailov

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.558309
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

A technology of smooth 15 - 50 nm thin Bi-film fabrication with the surface roughness of about 1 nm using two ultrahigh vacuum film growth methods, partially ionized beam deposition (PIBD) and molecular beam deposition (MBD), was developed. The dependence of film surface morphology on the key growth parameters, deposition rate, growth temperature, film thickness, and deposited particles energy was investigated by atomic force microscopy, and optimum growth conditions were determined. In the case of PIBD method, the accelerating voltage was found to influence the surface morphology most distinctly. The most uniform and smooth films with equal size grains and minimum roughness of 1 nm were grown at the accelerating voltage 3 - 4 kV. It was also found that bismuth films grown under the optimum condition 4 kV become continuous when the film thickness is more than 10 nm. In the case of MBD method, a decrease of the growth temperature down to 40°C substantially suppresses the growth of surface hillocks and the film surface roughness is reduced down to 1 nm. The obtained results can promote developing a nanotechnology for nanowire and quantum-well structure fabrication using thin semi-metallic Bi films.

Citation Download Citation

Anatoliy V. Chernykh, Aleksandr I. Il'in, Oleg V. Kononenko, and Gennady M. Mikhailov "Bi film growing for nanowire fabrication", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.558309

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available