Effect of electrostatic interaction between conductive cantilever and metal film on local anododic oxidation

A. N. Bulatov; V. K. Nevolin

doi:10.1117/12.558342

28 May 2004 Effect of electrostatic interaction between conductive cantilever and metal film on local anododic oxidation

A. N. Bulatov, V. K. Nevolin

Author Affiliations +

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.558342
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

As is shown, threshold voltage on the Au film that is necessary for electric contact depends on starting pressing force of the probe and interstatic interaction. Natural oxide on the Al surface can be a reason for amplification of threshold voltage. Under the action of pressing force oxide paths expand and oxide can be punctured.

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A. N. Bulatov and V. K. Nevolin "Effect of electrostatic interaction between conductive cantilever and metal film on local anododic oxidation", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.558342

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