28 May 2004 Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma
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Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.557001
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation
Abstract
Plasma parameters and chemical kinetics of Cl2/Ar plasma were investigated aimed at understanding the mechanism of Ar addition on mass composition of charged and neutral particles. The analysis was based on both experimental methods and plasma modeling. It was found that addition of Ar to Cl2 leads to deformation of the electron energy distribution function and to increase of the electron mean energy. Direct electron impact dissociation of Cl2 molecules represents the main source of chlorine atoms in plasma volume. The contributions of stepwise dissociation and ionization involving Ar metastable atoms were found to be negligible. Addition of Ar to Cl2 causes the decrease of both electron and ion densities due to the decrease of the total ionization rate and the acceleration of heterogeneous decay of charged particles.
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Alexander Efremov, Alexander Efremov, Vladimir Svettsov, Vladimir Svettsov, Chang-Il Kim, Chang-Il Kim, } "Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.557001; https://doi.org/10.1117/12.557001
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