Bodenseewerk GmbH generally works on challenging projects comprising Microsystems, e.g. micro-optics (micro-lenses, micro-mirrors). We utilize state-of-the-art laboratory equipment and simulation software (e.g. optical design with ZEMAX, ASAP and GLAD). Our recent activities on the development of several infrared micro-optical devices focus on high speed imaging of scenes with high angular resolution including the analysis of physical properties of the detected light (e.g. spectral content, polarization) utilizing staring IR sensors with focal-plane-arrays operating in a snap shot mode at high frame rates. We report about the development of so called micro-optical multiplexers which: (a) comprise micro-optical arrays and electro-mechanical micro-actuators, (b) image several fields of view with high resolution onto a single focal-plane-array, (c) image several fields of view with enhanced spatial resolution [by the factor of four compared to (b)] in a modified realization onto one focal-plane-array and (d) analyze the spectral content of an image using a single-band photon detector-array and multi-frame processing. The micro-opto-electro-mechanical multiplexer (MOEM) systems all consist of a primary objective, a MOEM image-steering respectively image coding device and a secondary objective. The primary objective images one or more suitable formed individual fields of view onto a common intermediate image plane. The MOEM devices comprise combinations of focusing and defocusing micro-lens-arrays, micro-shutter-arrays and micro-filter-arrays which are mounted parallel to each other near the intermediate image plane. The MOEM devices exhibit their above mentioned function modes by laterally displacing the micro-arrays with the help of modern micro-actuators. The secondary objective is utilized as relay optical stage. A modern common focal-plane-array is used as detector device.
The micro-actuators responsible for the relative displacement of the micro-arrays are highly miniaturized while maintaining large displacement ranges and high linearity, reproducable positioning and reliability. This paper outlines the general sensor concept, explains the underlying principles and delineates the optical systems layout. Recent hardware realizations useful in military applications concerning image and laser beam steering are presented.