Paper
30 August 2004 Multipurpose high-performance 160x120 uncooled IRFPA
Jean-Luc Tissot, Arnaud Crastes, Cyrille Trouilleau, Bruno Fieque, Sebastien Tinnes
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Abstract
Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Developments are focused on the improvement of their sensitivity, enabling the possibility of reducing the pixel pitch in order to decrease the total system (size and weight) by using smaller optics. The amorphous silicon technology is the latest one developed by CEA/LETI and transferred to ULIS to manufacture uncooled infrared 2D arrays. We developed for this device a low cost package based on existing technologies. This device is well adapted to multipurpose high volume applications where spatial resolution (in term of pixel number) is less important than device costs.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Luc Tissot, Arnaud Crastes, Cyrille Trouilleau, Bruno Fieque, and Sebastien Tinnes "Multipurpose high-performance 160x120 uncooled IRFPA", Proc. SPIE 5406, Infrared Technology and Applications XXX, (30 August 2004); https://doi.org/10.1117/12.544141
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Sensors

Amorphous silicon

Manufacturing

Thermography

Infrared radiation

Microbolometers

Staring arrays

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