Spatial characterization of light detectors with nanometric resolution

Javier Alda; Jose Manuel Lopez-Alonso; Jose Maria Rico-Garcia; Jesus Zoido; Glenn Boreman

doi:10.1117/12.543979

5 August 2004 Spatial characterization of light detectors with nanometric resolution

Javier Alda, Jose Manuel Lopez-Alonso, Jose Maria Rico-Garcia, Jesus Zoido, Glenn Boreman

Proceedings Volume 5407, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XV; (2004) https://doi.org/10.1117/12.543979
Event: Defense and Security, 2004, Orlando, Florida, United States

Abstract

The miniaturization of light detectors in the visible and infrared has produced devices with micrometric and sub-micrometric spatial features. Some of these spatial features are closely linked with the physical mechanism of detection. An example of these devices is an optical antennas. To spatially characterize optical antennas it is necessary to scan a probe beam on the plane of the optical antenna. The mapping of this response is then treated and analyzed. When the response of the antenna is monitorized at visible or near-infrared frequencies, a sub-micron scanning step is necessary. In this paper we show the experimental set-up of a measurement station having a spatial resolution of 50 nanometers. This station is devoted to spatially characterize micrometric detectors, and specially optical antennas. The origin of the uncertainties of the measurement protocol is shown and practically analyzed. This station is also applied for characterizing the temporal, spectral, and polarization sensitivity specifications of light detectors with the previously mentioned resolution.

Citation Download Citation

Javier Alda, Jose Manuel Lopez-Alonso, Jose Maria Rico-Garcia, Jesus Zoido, and Glenn Boreman "Spatial characterization of light detectors with nanometric resolution", Proc. SPIE 5407, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XV, (5 August 2004); https://doi.org/10.1117/12.543979

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