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12 August 2004 Passive millimeter-wave focal plane array
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Abstract
We built and tested a low-cost 8-by-8 millimeter-wave focal plane array using antenna-coupled micro-bolometers. The array consists of slot antennas coupled to nickel bolometers and was fabricated using optical lithography on high-resistivity silicon wafers. The measured noise equivalent temperature difference (NETD) of an individual element was 450 K. Simulation results corresponded with observed device performance. An improved design was then implemented using a square spiral antenna. We discuss the fabrication of this type of array element, include some modeling results, and present the methods and results of our measurements.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles F. Middleton, Guy Zummo, Arthur Robert Weeks, Albert N. Pergande, Lee Mirth, and Glenn D. Boreman "Passive millimeter-wave focal plane array", Proc. SPIE 5410, Radar Sensor Technology VIII and Passive Millimeter-Wave Imaging Technology VII, (12 August 2004); https://doi.org/10.1117/12.542753
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