12 April 2004 Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates
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Abstract
The fabrication and characterization of an optically addressable deformable mirror for spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5-μm thick grid of patterned photoresist supports the 2-μm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the backside of the GaAs wafer. Similar devices were also fabricated with InP. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage and frequency. A simplified analysis of device operation is also presented.
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B. Haji-Saeed, B. Haji-Saeed, R. Kolluru, R. Kolluru, Dana Pyburn, Dana Pyburn, R. Leon, R. Leon, S. K. Sengupta, S. K. Sengupta, Markus E. Testorf, Markus E. Testorf, W. D. Goodhue, W. D. Goodhue, Jed Khoury, Jed Khoury, Alvin J. Drehman, Alvin J. Drehman, Charles L. Woods, Charles L. Woods, John Kierstead, John Kierstead, } "Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates", Proc. SPIE 5437, Optical Pattern Recognition XV, (12 April 2004); doi: 10.1117/12.548069; https://doi.org/10.1117/12.548069
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