7 April 2004 An electrically tunable infrared filter on base of Fabry-Perot interferometer
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Proceedings Volume 5445, Microwave and Optical Technology 2003; (2004) https://doi.org/10.1117/12.558124
Event: Microwave and Optical Technology 2003, 2003, Ostrava, Czech Republic
Abstract
This contribution deals with design, fabrication and test of a micromachined Fabry-Perot-Interferometer in first order configuration. Main application fields are chemical analysis, infrared sensing and spectral imaging. Some of the most important properties of a FPI filter are the full width half maximum (FWHM) and the tunable spectral range which are generally limited by the curvature and tilt of the mirrors and by their reflectance.
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Steffen Kurth, Karla Hiller, Norbert Neumann, Matthias Heinze, Wolfram Doetzel, and Thomas Gessner "An electrically tunable infrared filter on base of Fabry-Perot interferometer", Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); doi: 10.1117/12.558124; https://doi.org/10.1117/12.558124
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