Some numerical models of dispersion curve fitting

Jaroslav Vlcek; Jaromir Pistora

doi:10.1117/12.560128

7 April 2004 Some numerical models of dispersion curve fitting

Jaroslav Vlcek, Jaromir Pistora

Proceedings Volume 5445, Microwave and Optical Technology 2003; (2004) https://doi.org/10.1117/12.560128
Event: Microwave and Optical Technology 2003, 2003, Ostrava, Czech Republic

Abstract

The parameters of two dispersion models for Si₃N₄ dots of multilayer 2D grating are established by the fitting procedures. The Gauss-Newton and Levenberg-Marquardt fitting algorithms are compared. Spectral ellipsometric measurements as the resource of experimental data are reported. In the objective function, various weighting coefficients corresponding to ellipsometric angles are tested.

Citation Download Citation

Jaroslav Vlcek and Jaromir Pistora "Some numerical models of dispersion curve fitting", Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); https://doi.org/10.1117/12.560128

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