20 August 2004 EPL data conversion system
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Proceedings Volume 5446, Photomask and Next-Generation Lithography Mask Technology XI; (2004) https://doi.org/10.1117/12.557779
Event: Photomask and Next Generation Lithography Mask Technology XI, 2004, Yokohama, Japan
Abstract
PATACON-EPL is a software product for converting semiconductor mask CAD data to the EB data of masks for EB steppers. This software has several functions, such as pattern placement corresponding to the structure of masks for EB steppers, complementary division for stencil masks, stitching for deforming the shape of a portion for connecting divided portions, proximity effect correction, machine control data generation, mask inspection data generation, and alignment mark insertion. This software operates in the environment in which several to some hundreds of Linux PC's are connected by a high-speed network.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masahiro Shoji, Masahiro Shoji, Nobuyasu Horiuchi, Nobuyasu Horiuchi, } "EPL data conversion system", Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); doi: 10.1117/12.557779; https://doi.org/10.1117/12.557779
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