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20 September 2004 Phototriggered XeCl lasers: from the first prototype to the industrial device
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Proceedings Volume 5448, High-Power Laser Ablation V; (2004) https://doi.org/10.1117/12.546693
Event: High-Power Laser Ablation, 2004, Taos, New Mexico, United States
Abstract
The phototriggering has been proposed many years ago as a way to improve the reliability of excimer lasers. It is now a mature technique that is used in conjunction with the most recent solid-state devices to make an industrial high average power excimer laser. After a brief historical introduction we here analyze the main features and scientific aspects of this discharge technique and give very recent results.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernard Lacour, Stephane Pasquiers, Vincent Puech, Daniel Blin, Ivan Tassy, and Philippe Delaporte "Phototriggered XeCl lasers: from the first prototype to the industrial device", Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); https://doi.org/10.1117/12.546693
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